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Transfer & Positioning Systems

Range of Custom designed Transfer Systems.
- Magnetically-Coupled Transfer System that can position a loaded cassette into a multitude of different chambers.
- Motorized Transport system with Quartz Rod to transfer a wafer into a furnace.
- Custom system with Six Heavy-Duty Manipulators, each with a coupling force of 180 lbs.
- Modified and Custom Loadlocks.
- UHV linear Guide
- 5-Axis Gonionmeter with heating and cooling capability.

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