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Category: Titanium Sublimation Pump

Titanium sublimation pumps are typically used as an effective way to pump getterable gases, such as hydrogen and nitrogen, in UHV systems. TSP’s are often combined with ion pumping, since the ion pump is effective with non-getterable gases such as argon and methane. The TSP can be added to the inside of an ion pump or as a separate pumping unit.

 

A titanium filament is subjected to a high current (usually around 40 A) periodically, reaching the sublimation temperature of titanium. As a result, clean titanium forms a thin film on the surrounding chamber walls. Due to the high reactivity of clean titanium, residual gas components colliding with the chamber walls are prone to react, forming a stable, solid product.

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