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Technical expertise
Coaxial plasma sources uses solid state microwave technology.
AURA-WAVE is an Electron Cyclotron Resonance (ECR) coaxial plasma source. It has been designed to be self-adapted once the plasma ignited. A magnetic field combined to the electromagnetic wave allows the creation of plasma at low pressure due to Electron Cyclotron Resonance.
HI-WAVE collisional coaxial plasma source was designed to avoid inside power-losses and has proved to be matched, i.e. no reflected power with no additional impedance matching system over 1 pressure decade, depending on the plasma gas. Moreover, plasma density higher than 1012 cm-3 could be easily obtained in multisource configuration at a few cm
from the sources. Typical applications of such source are generation of radicals (e.g. atomic oxygen), etching, PECVD and surface treatment
AURA Wave – ECR type | Hi-Wave – Collisional type | |
Pressure range | 10-4 to 10-2 mbar | 10-2 – 10-1 mbar |
Gas type | Ar, N2, O2, CH4, He, air,.. | Ar, O2, N2, air, H2, CH4 |
Plasma density | > 10e11 cm-3 at 10 cm | 10e12 cm-3 at 10 cm |
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Specialist in High-Vacuum technology.
Tel: +31 (0)226 33 21 00
E-mail: vacuum@demaco.nl
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Oester 2
NL-1723 HW Noord-Scharwoude
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PO Box 4
NL-1723 ZG Noord-Scharwoude
vacuum@demaco.nl
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